Description
This system is designed for the fluorination of DLC surfaces on various substrates.
The ECR zone is produced by a Nd-Fe-B permanent magnet which produces a high magnetic field launch of the microwave energy.
High magnetic field launch produces a highly stable and efficient ECR plasma.
PQ2000 Series permanent magnet low profile ECR source.
ASTeX AX2110 microwave power supply with remote magnetron head.
- Output 150 – 1000 Watt, PC controlled
20 inch outer diameter reactor chamber with Viton seals.
Six (6) MKS Instruments 2179A Kalrez sealed mass flow controllers, expandable to seven.
Wafer Chuck - Handling up to 300mm in diameter
- RF Biased, Via RFPP 1kW, 13.56 Mhz, with automatch
- Recirculating fluid cooling
- Helium backside cooling
- Temperature range -25C to 130C
- Mechanical clamp substrate holder
- NB: Higher temperatures can be achieved without helium backside cooling
- Balzers TMH 1001corrosive service Turbo
- ASTeX AX3060
The item is in used condition. It is not tested.
Item Representation
If there are multiple available for sale, you may not receive the one photoed, but they are all is similar condition.
Please refer to the item photos to verify that this item will fit your needs. Everything included is shown in the photos.
We have limited knowledge about this item; therefore, we would not be able to answer any questions related to its specifications, technical capabilities, or whether it is suitable for a specific application. We would suggest contacting the OEM or performing an internet search to obtain additional information required.
Please refer to the item photos to verify that this item will fit your needs. Everything included is shown in the photos.
We have limited knowledge about this item; therefore, we would not be able to answer any questions related to its specifications, technical capabilities, or whether it is suitable for a specific application. We would suggest contacting the OEM or performing an internet search to obtain additional information required.
Freight Shipping and Handling
Freight Shipping: Freight shipments are to be arranged by the buyer. Please contact us for estimated weight and dimensions. There is a truck height loading dock at our facility. Local pick up is an option.
Handling Cost: There will be a charge for handling/packing. The cost will be based on the packing method. This item will be packed on a wooden skid. For more information please contact us.
Handling Time: Items are typically ready to ship within 3-5 business days of receiving cleared payment.
Blind Shipments: We do not ship blind. All items ship to the address provided in the shipping details section of the sales record.
Expedited Shipping: We do not offer expedited shipping options at this time.
International Shipping: We ship within the US only and do not want our items shipped outside of the US. We do not accept orders from freight forwarders or other 3rd parties which represent international buyers.
Handling Cost: There will be a charge for handling/packing. The cost will be based on the packing method. This item will be packed on a wooden skid. For more information please contact us.
Handling Time: Items are typically ready to ship within 3-5 business days of receiving cleared payment.
Blind Shipments: We do not ship blind. All items ship to the address provided in the shipping details section of the sales record.
Expedited Shipping: We do not offer expedited shipping options at this time.
International Shipping: We ship within the US only and do not want our items shipped outside of the US. We do not accept orders from freight forwarders or other 3rd parties which represent international buyers.
Payment
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Payment is to be made at checkout. If you’re prompted to request a quote for handling cost at checkout please contact us for assistance.
